maker:kla tencor
model:p10(no computer)
상태:실사
가격:640만원
010-7208-5800
Specifications:
- Sample size: up to 200mm
- Low force head: 0.05 - 15mg
- 0.05mg resolution
- Step heigh repeatability, 0.001µm max. in the 13µm range; 0.005µm max in the 130µm range
- Scan length: 150mm
- Scan speed: 1µm/sec to 25mm/sec
- Scan sampling rates: 50, 100, 200, 500, 1000Hz
- Vertical range:
- at 0.008Å resolution: ±6.5µm
- at 0.8Å resolutions: ±65µm
- at 0.6Å resolutions: ±1000µm
- Horizontal resolution at 1µm/sec scan speed: 0.01µm
- Angle resolution: 0.001°
