maker:jipelec
mode:jetfirst
price:750만원
010-7208-5800
General Specification
1. Max. 4 inches diameter Si Wafer.
2. Ramp rate 100 °C/sec max.
3. Vacuum = 10-2 mbar max.
4.Thermocouple, TC = 20 °C to 1000 °C readable.
5. Pyrometer = 400 °C to 1300 °C readable
6. Max. operating Temp. = 1200 °C