maker:jipelec mode:jetfirst price:750만원 상태:실사 010-7208-5800 General Specification1. Max. 4 inches diameter Si Wafer. 2. Ramp rate 100 °C/sec max. 3. Vacuum = 10-2 mbar max. 4.Thermocouple, TC = 20 °C to 1000 °C readable. 5. Pyrometer = 400 °C to 1300 °C readable 6. Max. operating Temp. = 1200 °C